Piezo-Stages 1D-2D-3D
X, Z, XY and XYZ fine positioning with subnanometer resolution
C1a X-Stages are compact X-stages with smallest dimensions. The footprint is from 40Ă—40 mm to 60x60x21.5 mm only. The stiffness and lowest resonances are comparably high. So that the stages can be employed high-dynamically.
CPa Z-Stages are compact Z-stages with smallest dimensions. The footprint is from 40Ă—40 mm to 60Ă—60 mm only.
L2a Stages are made for scanning. The positioning-ranges are 300 ÎĽm or 600 ÎĽm. These stages are only 30 mm high. High precision frictionless flexure guiding leaves close to zero cross-talk and results in excellent flatness of motion. The large aperture of 66Ă—66 mm allows for access to the samples from top and bottom. L2a stages are also available with integrated Z-axes (see L3a).
Can be combined with a coarse positionning Microstage.
Three axis compact nanopositioner.
L3a Stages are made for scanning and tracking. The basic positioning-range for X and Y is from 300 μm up to 600µm. These stages are ideal for atomic-force and near-field microscopy. They are only 30 mm high and offer 66×66 mm apertures. High precision frictionless flexure guiding leaves close to zero cross-talk and results in excellent flatness of motion. Versions with different Z-ranges are available, in order to serve those applications that require more dynamics and higher resolution, as well as those that have to cover larger height-variations.
Can be combined with a coarse positionning Microstage.
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