CPa Z-Stages
CPa Z-Stages are compact Z-stages with smallest dimensions. The footprint is from 40×40 mm to 60×60 mm only.
Properties
Specifications
Properties
Please see specifications
Specifications
CPa Z-Stages, 100 µm
| Product-Code | CPO-L00100 | CPS-D00100 | Unit |
| Position-Sensor | SGS, Full-Bridge | ||
| Range, Closed Loop | – | 100 | µm |
| Range, Open Loop (0..150 V) | 75 | µm | |
| Range, Open Loop (-45..180 V) | 120 | µm | |
| Resolution, open loop | 0.5 | nm | |
| Resolution, closed loop | – | 1 | nm |
| Linearity, closed loop | – | 0.2 | % |
| Repeatability | – | 10 | nm |
| Push/Pull | 15/10 | N | |
| Lateral Force | 10 | N | |
| Stiffness | 1.5 | N/µm | |
| Resonance, unloaded | 370 | Hz | |
| Resonance, with 100 g load | 310 | Hz | |
| Electrical Capacitance @ 1V eff, 1kHz | 2.2 | µF | |
| Body-Material | Aluminium, stainless steel | ||
| Wire-Length | 1.5 | m | |
| Connector | Lemo | DSub15 | |
| Operating Temperature | -20.. 80 | °C | |
- Vacuum-Compatibility
- Non-Magnetic Versions
- Suitable Driver, open-loop, EBO-050100
- Suitable Controller, closed-loop, EBD-060100
CPa Z-Stages, 250 µm
| Product-Code | CPO-L00250 | CPS-D00250 | Unit |
| Position-Sensor | SGS, Full-Bridge | ||
| Range, Closed Loop | – | 250 | µm |
| Range, Open Loop (0..150 V) | 190 | µm | |
| Range, Open Loop (-45..180 V) | 300 | µm | |
| Resolution, open loop | 1.5 | nm | |
| Resolution, closed loop | – | 2.5 | nm |
| Linearity, closed loop | – | 0.2 | % |
| Repeatability | – | 25 | nm |
| Push/Pull | 15/10 | N | |
| Lateral Force | 10 | N | |
| Stiffness | 0.2 | N/µm | |
| Resonance, unloaded | 210 | Hz | |
| Resonance, with 100 g load | 190 | Hz | |
| Electrical Capacitance @ 1V eff, 1kHz | 2.2 | µF | |
| Body-Material | Aluminium, stainless steel | ||
| Wire-Length | 1.5 | m | |
| Connector | Lemo | DSub15 | |
| Operating Temperature | -20..+80 | °C | |
- Vacuum-Compatibility
- Non-Magnetic Versions
- Suitable Driver, open-loop, EBO-050100
- Suitable Controller, closed-loop, EBD-060100
CPa Z-Stages, 500 µm
| Product-Code | CPO-L00500 | CPS-D00500 | Unit |
| Position-Sensor | – | SGS, Full-Bridge | |
| Range, Open Loop (-45..180 V) | 600 | 600 | µm |
| Range, Closed Loop | – | 500 | µm |
| Resolution, open loop | 3 | 3 | nm |
| Resolution, closed loop | – | 5 | nm |
| Linearity, closed loop | – | 0.2 | % |
| Repeatability | – | 50 | nm |
| Push/Pull, maximum | 40/20 | N | |
| Lateral Force, maximum | 10 | N | |
| Stiffness | 0.15 | N/µm | |
| Resonance, unloaded | 260 | Hz | |
| Resonance, with 100 g load | 180 | Hz | |
| Electrical Capacitance @ 1V eff, 1kHz | 4.4 | µF | |
| Body-Material | aluminum/stainless-steel | ||
| Connector | Lemo | DSub15 | |
| Operating Temperature | -20..+80 | °C | |
- Vacuum-Compatibility
- Suitable Driver, open-loop, EBO-050100
- Suitable Controller, closed-loop, EBD-060100
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