MS-2000 XYZ Specifications for Standard Configuration
XY axis range of travel |
120 mm x 110 mm |
XY axis resolution (encoder step) |
22 nm |
XY axis RMS repeatability |
< 700 nm |
XY axis maximum velocity |
7 mm /sec |
Max Recommended Load (*higher loads available upon request) |
5kg |
*Shown with 6.35 mm pitch Lead Screw