MS-8000 XY Scanningtisch

The MS-8000 stage is suited to use with large industrial inspection microscopes such as the Nikon L200/300 series or Olympus MX51/61 series. The open frame allows for transmitted light illumination. The stage can be supplied with either a glass plate insert, or a variety of large format stage inserts, including a vacuum wafer chuck for semiconductor inspection.
The DC servo motor stage is compatible with either small precision anti-backlash gear-head motors or larger spur-head motors for faster speeds. The stage is also compatible with optional high accuracy linear encoders.

MS-8000 Features
  • Closed-loop DC servo control for precise positioning and highly repeatable focusing
  • Wide dynamic speed range with XY joystick control
  • Backlit LCD display shows X, Y, and Z coordinates
  • “Zero” and “Home” button for simple stand-alone operations
  • Compact ergonomic tabletop control unit size is 6”D x 9”W x 3”H
  • Microprocessor control with RS-232 serial and USB communications
  • Proven operation with many popular software packages
Lead Screw Options with 141:1 Anti-Backlash Gear-Head Motors
Lead Screw Pitch Options Encoder Resolution Maximum Speed Repeatability
1/4″ 22 nm 6.4 mm/sec 0.8 μm
1/2″ 44 nm 12 mm/sec 1.6 μm
1″ 88 nm 24 mm/sec 3.5 μm
Lead Screw Options with 3.7:1 Gear Head Motors
Lead Screw Pitch Options Encoder Resolution Maximum Speed Repeatability
1/16″ 210 nm 33 mm/sec 4.5 μm
1/4″ 0.84 μm 120 mm/sec 8.0 μm
1/2″ 1.7 μm 240 mm/sec 15.0 μm
MS-8000 Linear Encoder Options
Axis Resolution Scale Accuracy
XY 10 nm ± 3 μm per length of scale

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