D/4D Stage Lead Screw Options
Lead Screw Pitch Options |
Rotary Encoder Resolution |
Maximum Speed |
25.40 mm (Ultra-coarse) |
88 nm |
28 mm/sec |
12.70 mm (Super-coarse) |
44 nm |
14 mm/sec |
6.35 mm (Standard) |
22 nm |
7 mm/sec |
1.59 mm (Fine) |
5.5 nm |
1.75 mm/sec |
0.635 mm (Extra-fine) |
2.2 nm |
0.7 mm/sec |
*Shown with rotary encoder and 6.35 mm pitch lead screw
3D/4D Stage Specifications
Specifications |
Dimensions |
Encoder Resolution* |
5.5 nm |
With Linear Encoder |
10 nm |
RMS Repeatablilty (Typical)* |
<0.7 μm |
With Linear Encoder (Typical) |
200 nm |
Leadscrew Accuracy |
0.25 μm/mm |
With Linear Encoder |
± 3 μm/length scale |
Maximum Velocity* |
1.75 mm/sec |
Range of Travel* |
25 mm (1”) to 100 mm(4″) |
* With 1.59 mm pitch (16 TPI) Leadscrew