D/4D Stage Lead Screw Options
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Lead Screw Pitch Options | Rotary Encoder Resolution | Maximum Speed |
25.40 mm (Ultra-coarse) | 88 nm | 28 mm/sec |
12.70 mm (Super-coarse) | 44 nm | 14 mm/sec |
6.35 mm (Standard) | 22 nm | 7 mm/sec |
1.59 mm (Fine) | 5.5 nm | 1.75 mm/sec |
0.635 mm (Extra-fine) | 2.2 nm | 0.7 mm/sec |
*Shown with rotary encoder and 6.35 mm pitch lead screw
3D/4D Stage SpecificationsÂ
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Specifications | Dimensions |
Encoder Resolution* | 5.5 nm |
With Linear Encoder | 10 nm |
RMS Repeatability (Typical)* | < 0.7 ÎĽm |
With Linear Encoder (Typical) | 200 nm |
Leadscrew Accuracy | 0.25 ÎĽm/mm |
With Linear Encoder | ± 3 μm/length scale |
Maximum Velocity* | 1.75 mm/sec |
Range of Travel* | 25 mm (1”) to 100 mm(4″) |
* With 1.59 mm pitch (16 TPI) Leadscrew