L2a XY-Stages, Aperture
L2a Stages are made for scanning. The positioning-ranges are 300 μm or 600 μm. These stages are only 30 mm high. High precision frictionless flexure guiding leaves close to zero cross-talk and results in excellent flatness of motion. The large aperture of 66×66 mm allows for access to the samples from top and bottom. L2a stages are also available with integrated Z-axes (see L3a).
Properties
Specifications
Properties
Please see specifications
Specifications
| Product-Number | L2S-D10300 | L2S-D10600 | Unit |
| Position-Sensors | Strain-Gage (SGS), Full-Bridge | ||
| Range, closed loop | 300 | 600 | µm |
| Range, open loop (-45.. 180V) | 420 | 720 | µm |
| Resolution, closed loop | 3 | 6 | nm |
| Resolution, open loop | 1 | 2 | nm |
| Linearity, closed loop | 0.2 | % | |
| Repeatability, closed loop | 30 | 60 | nm |
| Stiffness | 1 | 0.5 | N/µm |
| Resonance, XY, unloaded | 210 | 175 | Hz |
| Resonance, Rot Z, unloaded | 270 | 215 | Hz |
| El. Capacitance @ 1V eff 1kHz | 13.2 | µF | |
| Dimensions (LxWxH) | 150x150x30 | mm | |
| Aperture, Dimensions (LxW) | 66×66 | mm | |
| Body/Platform-Material | Aluminum, black | ||
| Operating Temperature | -20.. 80 | °C | |
| Connector | DSub25 | ||
| Cable length | 1.5 | mm | |
- Vacuum-Compatibility and/or Non-Magnetic
- Suitable drivers, open-loop, EBO-050100
- Suitable controller, closed-loop, EBD-120220
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