C1a X-Stages
C1a X-Stages are compact X-stages with smallest dimensions. The footprint is from 40Ă—40 mm to 60x60x21.5 mm only. The stiffness and lowest resonances are comparably high. So that the stages can be employed high-dynamically.
Properties
Specifications
Properties
Please see specifications
Specifications
C1a X-Stages, 100 µm
| Product-Number | C1O-L00100 | C1S-D00100 | Unit |
| Â | Â | Â | Â |
| Position-Sensor | – | SGS |  |
| Range (-45..180 V) | 120 | 120 | µm |
| Range, closed loop | – | 100 | µm |
| Resolution, open loop | 0.5 | 0.5 | nm |
| Resolution, closed loop | – | 1 | nm |
| Linearity, closed loop | – | 0.2 | % |
| Repeatability, closed loop | – | 10 | nm |
| Load | 500 | g | |
| Push/Pull | 15/10 | N | |
| Stiffness | 1.5 | N/µm | |
| Lowest Resonance, unloaded | 370 | Hz | |
| Lowest Resonance, w/ load 30g | 310 | Hz | |
| El. Capacitance @ 1V eff. 1kHz | 2.2/axis | µF | |
| Body-Material | aluminum, stainless steel | Â | |
| Dimensions | 40x40x20 | mm | |
| Wire-Length | 1.5 | m | |
| Connector | Lemosa | DSub15 | Â |
| Operating Temperature | -20.. 80 | °C | |
Options:
- Vacuum-Compatibility
- Non-Magnetic Versions
- Suitable Driver, open-loop, EBO-050100
- Suitable Controller, closed-loop, EBD-060100
C1a X-Stages, 250 µm
Â
| Product-Number | C1O-L00250 | C1S-D00250 | Unit |
| Â | Â | Â | Â |
| Position-Sensor | – | SGS |  |
| Range (-45..180 V) | 330 | 330 | µm |
| Range, closed loop | – | 250 | µm |
| Resolution, open loop | 1 | 1 | nm |
| Resolution, closed loop | – | 3 | nm |
| Linearity, closed loop | – | 0.2 | % |
| Repeatability, closed loop | – | 25 | nm |
| Load | 150 | g | |
| Push/Pull | 15/10 | N | |
| Stiffness | 0.4 | N/µm | |
| Lowest Resonance, unloaded | 210 | Hz | |
| Lowest Resonance, w/ load 30g | 190 | Hz | |
| El. Capacitance @ 1V eff. 1kHz | 2.2/axis | µF | |
| Body-Material | aluminum, stainless steel | Â | |
| Dimensions | 40x40x20 | mm | |
| Wire-Length | 1.5 | m | |
| Connectors | Lemosa | DSub15 | Â |
| Operating Temperature | -20.. 80 | °C | |
Options:
- Vacuum-Compatibility
- Non-Magnetic Versions
- Suitable Driver, open-loop, EBO-050100
- Suitable Controller, closed-loop, EBD-060100
C1a X-Stages, 600 µm
Â
| Product-Number | C1O-L00600 | C1S-D00600 | Unit |
| Â | Â | Â | Â |
| Position-Sensor | – | SGS |  |
| Range (-45..180 V) | 900 | 900 | µm |
| Range, closed loop | – | 600 | µm |
| Resolution, open loop | 4 | 4 | nm |
| Resolution, closed loop | – | 6 | nm |
| Linearity, closed loop | – | 0.2 | % |
| Repeatability, closed loop | – | 50 | nm |
| Load | 200 | g | |
| Push/Pull | 50/20 | N | |
| Stiffness | 0.15 | N/µm | |
| Lowest Resonance, unloaded | 190 | Hz | |
| El. Capacitance @ 1V eff. 1kHz | 4.4/axis | µF | |
| Body-Material | aluminum, stainless steel | Â | |
| Dimensions | 60x60x21.5 | mm | |
| Wire-Length | 1.5 | m | |
| Connector | Lemosa | DSub15 | Â |
| Operating Temperature | -20.. 80 | °C | |
Options:
- Vacuum-Compatibility
- Non-Magnetic Versions
- Suitable Driver, open-loop, EBO-050100
- Suitable Controller, closed-loop, EBD-06010010
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