C3a CUBE XYZ-Stages
Three axis compact nanopositioner.
Properties
Specifications
Properties
Please see specifications
Specifications
C3a CUBE XYZ-Stages, 100 µm
| Product-Number | C3O-L00100 | C3S-D00100 | Unit |
| Â | Â | Â | Â |
| Position-Sensor | – | SGS |  |
| Displacement (0..150 V) | 75 | 75 | µm |
| Displacement (-45..180 V) | 120 | 120 | µm |
| Displacement, closed loop | – | 100 | µm |
| Resolution, open loop | 0.5 | 0.5 | nm |
| Resolution, closed loop | – | 1 | nm |
| Linearity, closed loop | – | 0.2 | % |
| Repeatability, closed loop | – | 10 | nm |
| Push/Pull | 15/10 | N | |
| Stiffness | 1.5 | N/µm | |
| Resonance, unloaded | 370 | Hz | |
| Resonance, w/ load 30g | 310 | Hz | |
| El. Capacitance @ 1V eff. 1kHz | 2.2/axis | µF | |
| Body-Material | aluminum, stainless steel | Â | |
| Dimensions | 40x40x44.6 | mm | |
| Wire-Length | 1.5 | m | |
| Connectors | Lemosa | DSub | Â |
| Operating Temperature | -20..80 | °C | |
- Vacuum-Compatibility and/or Non-Magnetic
- Suitable drivers, open-loop, EBO-050100
- Suitable controllers, closed-loop, EBD-060100
C3a CUBE XYZ-Stages, 250 µm
| Product-Number | C3O-L00250 | C3S-D00250 | Unit |
| Â | Â | Â | Â |
| Position-Sensor | – | SGS |  |
| Displacement (0..150 V) | 185 | 185 | µm |
| Displacement (-45..180 V) | 295 | 295 | µm |
| Displacement, closed loop | – | 250 | µm |
| Resolution, open loop | 1 | 1 | nm |
| Resolution, closed loop | – | 1.5 | nm |
| Linearity, closed loop | – | 0.2 | % |
| Repeatability, closed loop | – | 25 | nm |
| Push/Pull | 15/10 | N | |
| Stiffness | 0.4 | N/µm | |
| Lowest Resonance, unloaded | 210 | Hz | |
| Lowest Resonance, w/ load 30g | 190 | Hz | |
| El. Capacitance @ 1V eff. 1kHz | 2.2/axis | µF | |
| Body-Material | aluminum, stainless steel | Â | |
| Dimensions | 40x40x44.6 | mm | |
| Wire-Length | 1.5 | m | |
| 3 Connectors | Lemosa | DSub | Â |
| Operating Temperature | -20..80 | °C | |
C3a CUBE XYZ-Stages, 600 µm
| Product-Number | C3O-L00600 | C3S-D00600 | Unit |
| Â | Â | Â | Â |
| Position-Sensor | – | SGS |  |
| Range (-45..180 V) | 900x900x600 | 900x900x600 | µm |
| Range, closed loop | – | 600x600x500 | µm |
| Resolution, open loop | 4 | 4 | nm |
| Resolution, closed loop | – | 6 | nm |
| Linearity, closed loop | – | 0.2 | % |
| Repeatability, closed loop | – | 50 | nm |
| Load | 200 | g | |
| Push/Pull | 50/20 | N | |
| Stiffness | 0.15 | N/µm | |
| Lowest Resonances, unloaded | 190/145/130 | Hz | |
| El. Capacitance @ 1V eff. 1kHz | 4.4/axis | µF | |
| Body-Material | aluminum, stainless steel | Â | |
| Dimensions | 60x60x52 | mm | |
| Wire-Length | 1.5 | m | |
| Connectors | Lemosa | DSub15 | Â |
| Operating Temperature | -20.. 80 | °C | |
Options:
- Vacuum-Compatibility and/or Non-Magnetic
- Suitable drivers, open-loop, EBO-050100
- Suitable controllers, closed-loop, EBD-060100
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