L2a XY-Stages, Aperture
L2a Stages are made for scanning. The positioning-ranges are 300 ÎĽm or 600 ÎĽm. These stages are only 30 mm high. High precision frictionless flexure guiding leaves close to zero cross-talk and results in excellent flatness of motion. The large aperture of 66Ă—66 mm allows for access to the samples from top and bottom. L2a stages are also available with integrated Z-axes (see L3a).
Properties
Specifications
Properties
Please see specifications
Specifications
| Product-Number | L2S-D10300 | L2S-D10600 | Unit |
| Â | Â | Â | Â |
| Position-Sensors | Strain-Gage (SGS), Full-Bridge | Â | |
| Range, closed loop | 300 | 600 | µm |
| Range, open loop (-45.. 180V) | 420 | 720 | µm |
| Resolution, closed loop | 3 | 6 | nm |
| Resolution, open loop | 1 | 2 | nm |
| Linearity, closed loop | 0.2 | % | |
| Repeatability, closed loop | 30 | 60 | nm |
| Stiffness | 1 | 0.5 | N/µm |
| Resonance, XY, unloaded | 210 | 175 | Hz |
| Resonance, Rot Z, unloaded | 270 | 215 | Hz |
| El. Capacitance @ 1V eff 1kHz | 13.2 | µF | |
| Dimensions (LxWxH) | 150x150x30 | mm | |
| Aperture, Dimensions (LxW) | 66Ă—66 | mm | |
| Body/Platform-Material | Aluminum, black | Â | |
| Operating Temperature | -20.. 80 | °C | |
| Connector | DSub25 | Â | |
| Cable length | 1.5 | mm | |
- Vacuum-Compatibility and/or Non-Magnetic
- Suitable drivers, open-loop, EBO-050100
- Suitable controller, closed-loop, EBD-120220
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