L3a XYZ-Stages, Aperture

L3a Stages are made for scanning and tracking. The basic positioning-range for X and Y is 300 μm to 600 µm. These stages are ideal for atomic-force and near-field microscopy. They are only 30 mm high and offer 66×66 mm apertures. High precision frictionless flexure guiding leaves close to zero cross-talk and results in excellent flatness of motion. Versions with different Z-ranges are available, in order to serve those applications that require more dynamics and higher resolution, as well as those that have to cover larger height-variations.


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