MS-8000 XY Automated Stage
The MS-8000 stage is suited to use with large industrial inspection microscopes such as the Nikon L200/300 series or Olympus MX51/61 series. The open frame allows for transmitted light illumination. The stage can be supplied with either a glass plate insert, or a variety of large format stage inserts, including a vacuum wafer chuck for semiconductor inspection.
The DC servo motor stage is compatible with either small precision anti-backlash gear-head motors or larger spur-head motors for faster speeds. The stage is also compatible with optional high accuracy linear encoders.
Properties
Specifications
Properties
MS-8000 Features
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- Closed-loop DC servo control for precise positioning and highly repeatable focusing
- Wide dynamic speed range with XY joystick control
- Backlit LCD display shows X, Y, and Z coordinates
- “Zero” and “Home” button for simple stand-alone operations
- Compact ergonomic tabletop control unit size is 6”D x 9”W x 3”H
- Microprocessor control with RS-232 serial and USB communications
- Proven operation with many popular software packages
Lead Screw Options with 141:1 Anti-Backlash Gear-Head Motors
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Lead Screw Pitch Options | Encoder Resolution | Maximum Speed | Repeatability |
1/4″ | 22 nm | 6.4 mm/sec | 0.8 μm |
1/2″ | 44 nm | 12 mm/sec | 1.6 μm |
1″ | 88 nm | 24 mm/sec | 3.5 μm |
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Lead Screw Options with 3.7:1 Gear Head Motors
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Lead Screw Pitch Options | Encoder Resolution | Maximum Speed | Repeatability |
1/16″ | 210 nm | 33 mm/sec | 4.5 μm |
1/4″ | 0.84 μm | 120 mm/sec | 8.0 μm |
1/2″ | 1.7 μm | 240 mm/sec | 15.0 μm |
MS-8000 Linear Encoder Options
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Axis | Resolution | Scale Accuracy |
XY | 10 nm | ± 3 μm per length of scale |
Specifications
Downloads
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