Piezo Stages for a wide range of applications

Nanopositioning is optimally done by piezo-drives in combination with EDM-cut flexures for levers and guidance. These components avoid stiction and friction, so that positions can really be set with even sub-nanometer accuracy. Relative to the maximum dispacements, resolutions of 5 ppm, repeatabilities of 50 ppm and linearities of 100 ppm are possible.

 
 

Nano-Positioning overview

Nanopositioning is optimally done by piezo-drives in combination with EDM-cut flexures for levers and guidance. These components avoid stiction and friction, so that positions can really be set with even sub-nanometer accuracy. Relative to the maximum dispacements, resolutions of 5 ppm, repeatabilities of 50 ppm and linearities of 100 ppm are possible.

 

Overview of the available systems

 

» SPS Sample Z-Inserts

SPS Inserts are flat Z-stages, that can be integrated into most standard XY-stages of microscopes. They provide most precise positioning along the optical axis. SPS Inserts are available with 3 different ranges: 120, 250 and 500 µm. The dimensions are the same for all ranges. The aperture of 128.5 x 86.5 mm can bear the optional sample- and petri-dish-holders.

 

 

 

» SFS QuickFocus

SFS-D00100 is a positioner/scanner for microscope objectives. The advantages relative to other products on the market are: shortened body to give more handling space and improved dynamics for faster positioning/scanning.

 

 

» SFS SlimFocus

SFS-D00150 SlimFocus are designed to give microscope-users free space around the objectives or other probes. The travel range is 150 µm.


» SFS RangeFocus

SFS RangeFocus is a series of positioners/scanners with long ranges for microscope objectives. The available displacements are 100 to 600 µm. The body-height is short, so that space is saved in the important direction towards the samples. Mounting and exchange is made simple by clamping the unit to the top adapter by a standard screw (Allen-key). RangeFocus positioners are equipped with position-sensors for defined positioning with high linearity and repeatability.

» SFS MegaFocus 1000 µm

SFS MegaFocus is a positioner/scanner with a range as long as 1000 µm for microscope objectives. The body-height is short, so that space is saved in the important direction towards the samples. Mounting and exchange is made simple by clamping the unit to the top adapter by a standard screw (Allen-key). MegaFocus positioners are equipped with position-sensors for defined positioning with high linearity and repeatability.

 



» 1D - 2D - 3D Stages

A wide range of X, Z, XY and XYZ systems in many variations and travel ranges are available.

 

 

 

» Tip/Tilt Stages

T2a piezo-driven platforms tip and tilt reflective optics in only milliseconds – this with resolutions of nano-rad magnitude. The two standard versions with 6 and 12 mrad deflection are made for optics with up to 3″ diameters. The perpendicular axes are at one level 8.3 mm below the platform-surface.

 

 

 

 
 

Our contact details

micrasys
Tel. +49 (0) 2772 - 82 466
Mobil +49 (0) 163 - 77 33 917
E-Mail info@micrasys.com

 

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