Large Stages
All axes derive their precise control through the use of closed-loop DC servomotors employing high-resolution rotary encoders for positioning feedback. By using closed-loop control of the stage position, there is no chance that the stage will become lost, as can occur with open-loop micro-stepped stages after a number of moves and direction changes.
The MS-8000 stage is suited to use with large industrial inspection microscopes.
Larger travel distances are required for semiconductor inspection and other demanding applications. For these applications, ASI offers stages in the standard sizes shown below.
GTS-Series Gantry Translation Stages offer three precision closed-loop DC servo motor linear actuators available in a range of travels. The standard 15-inch unit, shown, allows 380 mm of travel in the X and Y coordinates and 100 mm (4”) of travel in the Z axis, with smaller and larger travel ranges available.
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